Active Area Deposition Mask, High Density
High Density Active Area Deposition Mask
for use with Ossila's high-density OFET system
An evaporation mask for deposition onto the active area of a device, for use with Ossila's high-density OFET system.
Outer dimensions: 75 mm x 75 mm
Number of OFETs: 20 per substrate.
Mask with direct contact (no spacer): For sputtering and other non-directional deposition systems, as well as for thermal deposition systems with oblique angles or a very short throw, we recommend the use of the direct contact mask to get well-defined edges.
Mask with 100 μm spacer: For normal thermal evaporation systems we recommend the use of masks with the 100 μm spacer to help avoid scratches and allow better out-gassing.
Datasheet
Size | 75 mm x 75 mm |
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Thickness | 1.7mm without spacer, 1.8mm with spacer (exc. bolts) |
Material | Stainless steel |
Substrate capacity | E338: 12 (S221, S223 or S403) E339: 12 (S233, S411) |